Development of 14.5 Ghz Electron Cyclotron Resonance Ion Source at Kaeri*

A 14.5 GHz ECRIS has been designed and fabricated at KAERI (Korea Atomic Energy Research Institute) to produce multi-charged ion beam (especially for C ion beam) for medical application. The magnet system has cupper conductor solenoid coils and a permanent magnet hexapole. A welded tube with aluminium and stainless steel is used for an ECR plasma chamber to improve the production of secondary electron. A Krystron supplies microwave energy to the plasma. A movable beam extractor with 8 mm aperture covers different species and different charge numbers of the beam. Fabrication and initial experimental results on ECR plasma are discussed in this paper.